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Journal of Analytical Atomic Spectrometry

Volumn 17, Issue 6, 2002, Pages 565-569

Diagnostic studies of a low-pressure inductively coupled plasma in argon using a double Langmuir probe

(3) Sung, Yong ik a Lim, H B a Houk, R S b

a Dankook University (South Korea)

b IOWA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; INDUCTIVELY COUPLED PLASMA; PROBES; VACUUM APPLICATIONS;

LANGMUIR PROBES;

CARRIER CONCENTRATION;

EID: 0036017199 PISSN: 02679477 EISSN: None Source Type: Journal
DOI: 10.1039/b110219m Document Type: Article

Times cited : (34)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.