The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas

Applied Physics Letters

Volumn 93, Issue 5, 2008, Pages

  Lapke, M ^a   Mussenbrock, T ^a   Brinkmann, R P ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; GAS ABSORPTION; GLOW DISCHARGES; PLASMA DENSITY; PLASMA JETS; PROBES; RESONANCE;

ANALYTICAL EVALUATIONS; BOUNDED SURFACES; CALIBRATION FREE; COLLISION RATES; LOW-PRESSURE GAS; LOW-PRESSURE PLASMAS; MEASURED SIGNALS; MULTIPOLE; MULTIPOLE FIELDS; PLASMA PARAMETERS; RADIO FREQUENCIES; REACTIVE PLASMAS; SIMULTANEOUS DETERMINATIONS; SPHERICAL DESIGNS;

ELECTRON TEMPERATURE;

EID: 51849088111     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2966351     Document Type: Article

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