Experimental characterisation of the plasma absorption probe

Plasma Processes and Polymers

Volumn 4, Issue 6, 2007, Pages 605-611

  Scharwitz, Christian ^a   Böke, Marc ^a   Hong, Suk Ho ^b   Winter, Jörg ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b IRFM   (France)

Author keywords

Discharge characterisation; Electron density; Films; Low pressure discharges; Process control; Reactive plasmas

Indexed keywords

ABSORPTION; DIELECTRIC MATERIALS; ELECTRON DENSITY MEASUREMENT; NATURAL FREQUENCIES; PLASMA FLOW; REFLECTION;

PLASMA ABSORPTION PROBE; REACTIVE PLASMA;

PLASMA PROBES;

EID: 34548125368     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200700047     Document Type: Article

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