Fabrication of regular nanostructures on the surface of Si by AFM anodic oxidation

Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

Volumn 40, Issue 7, 2008, Pages 1055-1058

  Yan, Yong Da ^a   Zhang, Jing ^a   Sun, Tao ^a   Liang, Ying Chun ^a   Dong, Shen ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

AFM; Anodic oxidation; Nanomachining; Si

Indexed keywords

FABRICATION; NANOSTRUCTURES; SILICON; SILICON COMPOUNDS;

AFM ANODIC OXIDATION; ANODIC OXIDATION METHOD; COMPLEX NANOSTRUCTURES; HIGH PRECISION STAGE; MACHINING SPEED; NANOMACHINING; REPETITIVE POSITIONING; TYPE STRUCTURES;

ANODIC OXIDATION;

EID: 51649118806     PISSN: 03676234     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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