Beyond van der Pauw: Sheet resistance determination from arbitrarily shaped planar four-terminal devices with extended contacts

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2008, Pages 23-28

  Cornils, M ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

TERMINAL DEVICES; TEST STRUCTURES; VAN DER PAUW;

ELECTRIC RESISTANCE;

EID: 51349156783     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2008.4509309     Document Type: Conference Paper

References (11)

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