Micromachining of grooves for cutting fused silica plates with femtosecond laser pulses

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn , Issue , 2007, Pages

  Ahmed, Farid ^a   Man, Seop Lee ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; LASERS; MACHINING; MICROMACHINING; PLASTICS MOLDING MACHINES; SILICA; ULTRASHORT PULSES;

ELECTRO-OPTICS; FUSED SILICA PLATES; PACIFIC RIM;

FUSED SILICA;

EID: 51249098121     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CLEOPR.2007.4391473     Document Type: Conference Paper

References (5)

1. N. Barshch, K. Korber, "Ablation and cutting of planar silicon devices using femtosecond laser pulses" Appl. Phys. A 77, 237-242 (2003).
2. A.Borowiec. H. K. Haugen, " Femtosecond laser micromachining of grooves in indium phospide," Appl. Phys. A 79, 521-529 (2004).
3. Arzu M. Ozkan, Leonard Migliore, "Glass processing using femtosecond and nanosecond pulsed laser," SPIE Proc. Vol. 4978 (2003)
4. Mohammad R. Kasaai, Vijayalakshmi Kacham, Francis Theberge, "The interaction of femtosecond and nanosecond laser pulses with surface of glass," Journal of Non-Crystalline Solids 319, 129-135 (2003)
5. T. H. R. Crawford, A. Borowiec, "Femtosecond laser micromachining of grooves in silicon with 800 nm pulses," Appl. Phys. A 80 1717-1724 (2005)