Room-temperature direct bonding for integrated optical devices

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn , Issue , 2007, Pages 182-183

  Takei, R ^a   Abe, K ^a   Mizumoto, T ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CERIUM; OPTICAL INSTRUMENTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON;

DIRECT BONDING; ELECTRO-OPTICS; ROOM TEMPERATURES;

WAFER BONDING;

EID: 51249091240     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/LEOS.2007.4382337     Document Type: Conference Paper

References (7)

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