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Volumn , Issue , 2008, Pages 46-48

3D die-to-wafer Cu/Sn microconnects formed simultaneously with an adhesive dielectric bond using thermal compression bonding

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; BOND (MASONRY); COMPUTER NETWORKS; DATA COMPRESSION; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS PACKAGING; INTERCONNECTION NETWORKS; JOINTS (STRUCTURAL COMPONENTS); PLASTIC PARTS; RELIABILITY;

EID: 50949090622     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2008.4546921     Document Type: Conference Paper
Times cited : (30)

References (9)
  • 1
    • 0346448773 scopus 로고    scopus 로고
    • Processing of inter-wafer vertical interconnects in 3D ICs
    • MRS
    • J.-Q. Lu, et al, "Processing of inter-wafer vertical interconnects in 3D ICs," Proc. Advanced Metallization Conference 2002 (AMC 2002), Vol. V18 MRS, 2003, pp. 45-51.
    • (2003) Proc. Advanced Metallization Conference 2002 (AMC 2002) , vol.V18 , pp. 45-51
    • Lu, J.-Q.1
  • 2
    • 0036928172 scopus 로고    scopus 로고
    • Electrical integrity of state-of-the-art 0.13 μm SOI CMOS devices and circuits transferred for three-dimensional (3D) integrated circuit(IC) fabrication
    • IEDM, December
    • K.W. Guarini et al, "Electrical integrity of state-of-the-art 0.13 μm SOI CMOS devices and circuits transferred for three-dimensional (3D) integrated circuit(IC) fabrication," in Digest of International Electron Device Meeting (IEDM) 2002, December 2002, pp. 943-945.
    • (2002) Digest of International Electron Device Meeting , pp. 943-945
    • Guarini, K.W.1
  • 3
    • 24644439334 scopus 로고    scopus 로고
    • Wafer bonding of Damascene-Patterned Metal/Adhesive Redistribution Layers for Via-First Three Dimensional Interconnect
    • J. J. McMahon, J.-Q. Lu, R. J. Gutmann, "Wafer bonding of Damascene-Patterned Metal/Adhesive Redistribution Layers for Via-First Three Dimensional Interconnect," in Proc. 55th Electronic Components and Technology Conference, Vol.1, 2005, pp. 331-6
    • (2005) Proc. 55th Electronic Components and Technology Conference , vol.1 , pp. 331-336
    • McMahon, J.J.1    Lu, J.-Q.2    Gutmann, R.J.3
  • 5
    • 34250809512 scopus 로고    scopus 로고
    • B. Charlet, 3-D integration latest developments at LETI, MRS Fall 2006 Symp. Proc. 970, 0970-Y01-05.
    • B. Charlet, "3-D integration latest developments at LETI," MRS Fall 2006 Symp. Proc. Vol 970, 0970-Y01-05.
  • 7
    • 0009422261 scopus 로고
    • Applications of solid-liquid interdiffusion bonding in integrated circuit fabrication
    • L.Bernstein, H. Bartholomew, "Applications of solid-liquid interdiffusion bonding in integrated circuit fabrication," Transaction of the Metallurgical Society of AIME, 1966, 236, 302-412.
    • (1966) Transaction of the Metallurgical Society of AIME , vol.236 , pp. 302-412
    • Bernstein, L.1    Bartholomew, H.2
  • 8
    • 0346938517 scopus 로고    scopus 로고
    • P. Ramm, A. Klumpp, R. Merkel, J. Weber, R. Wieland, A. Ostmann, J. Wolf, 3D system integration technologies, Proc. Advanced Metallization Conference 2003, Mater. Res. 766 pp.3-14.
    • P. Ramm, A. Klumpp, R. Merkel, J. Weber, R. Wieland, A. Ostmann, J. Wolf, "3D system integration technologies," Proc. Advanced Metallization Conference 2003, Mater. Res. Vol.766 pp.3-14.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.