Emissive probe diagnostics in low temperature plasma - Effect of space charge and variations of electron saturation current

Contributions to Plasma Physics

Volumn 48, Issue 5-7, 2008, Pages 491-496

  Marek, A ^a   Jilek M ^a   Pickova I ^a   Kudrna, P ^a   Tichy M ^a   Schrittwieser, R ^b   Ionita, C ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITY OF INNSBRUCK   (Austria)

Author keywords

Emissive probe; Probe contamination; Space charge effect

Indexed keywords

MAGNETRONS; PLASMA DEVICES; PLASMA JETS;

ARGON PLASMAS; ELECTRON SATURATION; EMISSIVE PROBE; LOW TEMPERATURE PLASMAS; LOWS-TEMPERATURES; PLASMA EFFECTS; PROBE CONTAMINATION; PROBE DIAGNOSTICS; SATURATION CURRENT; SPACE CHARGE EFFECTS;

TEMPERATURE;

EID: 50849096198     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.200810079     Document Type: Conference Paper

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