Topography description of thin films by optical Fourier Transform

Thin Solid Films

Volumn 516, Issue 22, 2008, Pages 8077-8081

  Jaglarz, Janusz ^a  

^a CRACOW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Biredirectional reflection distribution function; Optical profilometry; Surface thopography

Indexed keywords

ATOMIC FORCE MICROSCOPY; DISTRIBUTION FUNCTIONS; ENGINEERING GEOLOGY; FOURIER TRANSFORMS; IMAGING TECHNIQUES; LIGHT REFLECTION; LITHIUM COMPOUNDS; MICROSCOPIC EXAMINATION; POWER SPECTRAL DENSITY; SCANNING PROBE MICROSCOPY; SURFACE TOPOGRAPHY; THICK FILMS; THIN FILMS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

BIDIRECTIONAL REFLECTION DISTRIBUTION FUNCTIONS; BIREDIRECTIONAL REFLECTION DISTRIBUTION FUNCTION; FOURIER TRANSFORM (FT); METALLIC TIN; OPTICAL DATA; OPTICAL FOURIER TRANSFORMS; OPTICAL PROFILOMETRY; SURFACE POWER; SURFACE PROFILING; SURFACE THOPOGRAPHY;

OPTICAL FILMS;

EID: 50649108591     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.072     Document Type: Article

References (10)

1. Stover J.C. Optical Scattering. Measurements and Analysis. 2nd ed. (1995), SPIE Opt. Eng. Press, Bellingham
2. Church E.L., Takacs P.Z., and Leonard T.A. Proc. SPIE 1165 (1989) 136
3. Elson J.M., and Bennett J.M. J. Opt. Soc. Am. 69 (1979) 31
4. Ronnow D., Eisenhammer T., and Roos T. Solar Energy Mater. Solar Cells 52 (1998) 37
5. Beckmann P., and Spizinochino B. The scattering of electromagnetic waves from rough surfaces (1963), Pergamon Press, Oxford
6. Zieba L., Jaglarz J., Dabrowski M., Duraj R., Cisowski J., and Jurusik J. Rev. Adv Mat. Sci. 15 (2007) 63
7. Mainsah E., Dong W.P., and Stout K.J. Measurement 17 (1996) 173
8. Bogdal D., and Jaskot K. Synth. Commun. 38 (2000) 33
9. Jaglarz J., Sanetra J., Wagner T., and Cisowski J. Opt. Mater. 29 (2007) 908
10. Bennet H.E., and Porteus J.O. J. Opt. Soc. Am. 51 (1961) 123