Surface topography investigations of TiN layers on different substrates

Reviews on Advanced Materials Science

Volumn 15, Issue 1, 2007, Pages 63-68

  Zieba, Łukasz ^a   Jaglarz, J ^a   Dabrowski, M ^a   Duraj, R ^a   Cisowski, J ^a,b   Jurusik, J ^b  

^a CRACOW UNIVERSITY OF TECHNOLOGY   (Poland)

^b CENTRE OF POLYMER AND CARBON MATERIALS   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION FUNCTIONS; PHYSICAL VAPOR DEPOSITION; POWER SPECTRAL DENSITY; PROBABILITY DENSITY FUNCTION; PROFILOMETRY; PROTECTIVE COATINGS; REFLECTION; SUBSTRATES; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

BIDIRECTIONAL REFLECTION DISTRIBUTION FUNCTION; POWER SPECTRAL DENSITY FUNCTION;

TITANIUM NITRIDE;

EID: 38549173232     PISSN: 16065131     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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