Dielectric barrier discharge assisted chemical vapor deposition of boron nitride phosphide films on a quartz substrate

Surface and Coatings Technology

Volumn 202, Issue 24, 2008, Pages 6049-6053

  Xi Wen, Zhang ^a   Gao rong, Han ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Boron nitride phosphide (BNP); Chemical vapor deopsition (CVD); Dielectric barrier discharge (DBD); Transmission electron microscopy (TEM); UV detector

Indexed keywords

ABSORPTION; BORON; CHEMICAL VAPOR DEPOSITION; DIELECTRIC DEVICES; DISCHARGE (FLUID MECHANICS); FLOW CONTROL; NITRIDES; NONMETALS; OXIDE MINERALS; PLASMAS; QUARTZ; VAPORS;

BORON NITRIDE PHOSPHIDE (BNP); CHEMICAL COMPOSITIONS; CHEMICAL VAPOR DEOPSITION (CVD); CHEMICAL VAPORS; DIELECTRIC BARRIER DISCHARGE (DBD); DIELECTRIC-BARRIER DISCHARGES; QUARTZ SUBSTRATES; SPECTRAL MEASUREMENTS; TRANSMISSION ELECTRON MICROSCOPY (TEM); UV DETECTOR; UV-VIS ABSORPTIONS;

BORON NITRIDE;

EID: 50449085367     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.07.002     Document Type: Article

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