Real time spectroscopic ellipsometry study during the growth of nanocrystalline nitride protective coatings

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 4, 2004, Pages 1822-1829

  Aouadi, S M ^a   Debessai, M ^a   Tomek, R ^a   Maeruf, T ^a  

^a SOUTHERN ILLINOIS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRUDE-LORENTZ MODEL; OPTICAL RESPONSE; PLASMA FREQUENCIES; REAL TIME SPECTROSCOPIC ELLIPSOMETRY (RTSE);

BAND STRUCTURE; COMPOSITION; CRYSTAL GROWTH; ELECTRIC CONDUCTIVITY; ELECTRONIC PROPERTIES; ELLIPSOMETRY; HETEROJUNCTIONS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; NIOBIUM COMPOUNDS; PROTECTIVE CLOTHING; TANTALUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; TRANSPORT PROPERTIES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NITRIDES;

EID: 5044221732     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1771662     Document Type: Article

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