Anomaly in fabrication processes for large-scale array detectors of superconducting tunnel junctions

Journal of Low Temperature Physics

Volumn 151, Issue 1-2 PART 1, 2008, Pages 316-321

  Ukibe, M ^a   Chen, Y ^a   Shimizugawa, Y ^a   Kobayashi, Y ^a   Kurokawa, A ^a   Ohkubo, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Array detector; Mass spectroscopy; Nb STJ; Residual stress; X ray spectroscopy

Indexed keywords

ETCHING; LEAKAGE CURRENTS; MASS SPECTROMETRY; RESIDUAL STRESSES; X RAY SPECTROSCOPY;

ARRAY DETECTOR; STEP-FRINGE PROBLEM;

TUNNEL JUNCTIONS;

EID: 40649089857     PISSN: 00222291     EISSN: 15737357     Source Type: Journal    
DOI: 10.1007/s10909-007-9650-0     Document Type: Article

References (3)

1. 1. M. Ukibe A. Kushino Y. Chen M. Ohkubo 2007 X-Ray Spectrom. 36 260 10.1002/xrs.967 M. Ukibe, A. Kushino, Y. Chen, M. Ohkubo, X-Ray Spectrom. 36, 260 (2007)
2. 2. R.J. Wenzel U. Matter L. Schultheis R. Zenobi 2005 Anal. Chem. 77 4329 10.1021/ac0482054 R.J. Wenzel, U. Matter, L. Schultheis, R. Zenobi, Anal. Chem. 77, 4329 (2005)
3. 3. S. Ariyoshi H. Matsuo C. Otani T. Morishima H. Sato H.M. Shimizu 2002 RIKEN Rev. 47 43 S. Ariyoshi, H. Matsuo, C. Otani, T. Morishima, H. Sato, H.M. Shimizu, RIKEN Rev. 47, 43 (2002)