Functional multilayer coatings of tetravinylsilane

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5505-5507

  Studynka, J ^a   Cechalova, B ^a   Cech, V ^a  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Ellipsometry; FTIR; Multilayer; PECVD; Tetravinylsilane

Indexed keywords

CHEMICAL PROPERTIES; CLADDING (COATING); COATINGS; MONOMERS; MULTILAYERS; NONMETALS; OXYGEN; PLASMA DEPOSITION; PLASMAS; PROTECTIVE COATINGS; SPECTROSCOPIC ELLIPSOMETRY; THICKNESS MEASUREMENT;

BI LAYERS; CHEMICAL-; COATING THICKNESSES; DEPOSITION CONDITIONS; ELLIPSOMETRY; FTIR; FUNCTIONAL COATINGS; LAYERED STRUCTURED; MULTI LAYERING; MULTI-LAYER COATINGS; MULTILAYER; OXYGEN GASES; PECVD; PHYSICAL PROPERTIES; PLASMA POLYMERS; TETRAVINYLSILANE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 50349089304     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.027     Document Type: Article

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