Physico-chemical properties of plasma-polymerized tetravinylsilane

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5512-5517

  Cech, V ^a   Studynka, J ^a   Conte, N ^b   Perina, V ^c  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^b CSM Instruments SA   (Switzerland)

^c NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

Author keywords

B Nano indentation; C PE CVD; Atomic force microscopy (AFM); Ellipsometry; Infrared spectroscopy; Rutherford backscattering spectroscopy

Indexed keywords

ELASTIC MODULI; GLOW DISCHARGES; HARDNESS; INDENTATION; INFRARED SPECTROSCOPY; LASER MODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; SURFACE ROUGHNESS;

DEPOSITION RATE; TETRAVINYLSILANE;

SILANES;

ELASTIC MODULI; GLOW DISCHARGES; HARDNESS; INDENTATION; INFRARED SPECTROSCOPY; LASER MODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILANES; SILICON WAFERS; SURFACE ROUGHNESS;

EID: 33846505375     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.086     Document Type: Article

References (11)

1. Wrobel A.M., and Wertheimer M.R. In: d'Agostino R. (Ed). Plasma Deposition, Treatment, and Etching of Polymers (1990), Academic Press, New York 163
2. Segui Y. In: d'Agostino R., Favia P., and Fracassi F. (Eds). Proceedings of NATO ASI Plasma Processing of Polymers (1997), Acquafredda di Maratea, Kluwer Academic Publ. 305
3. V. Cech, J. Vanek, J. Zemek, L. Zajickova, R. Prikryl, Variety of functional interlayers utilizable for polymer composites, Proc. 11th Int. Conf. on Composites/NanoEngineering, August 8-14, 2004, Marriott Hilton-Head Beach and Golf Resort, South Carolina, USA, pp. 2.
4. Cech V., Vanek J., Goruppa A.A., and Jones F.R. J. Mater. Sci. 40 (2005) 5099
5. Cech V., Prikryl R., Balkova R., Vanek J., and Grycova A. J. Adhes. Sci. Technol. 17 (2003) 1299
6. Saarilahti J., and Rauhala E. Nucl. Instrum. Methods Phys. Res. B64 734 (1992)
7. Mayer M. SIMNRA User's Guide, Forschungscentrum JulichInst. fur Plasmaphysik (1998)
8. Yasuda H. Plasma Polymerization (1985), Academic Press, Orlando
9. Lin-Vein D., Colthup N.B., Fateley W.G., and Grasselli J.G. The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules (1991), Academic Press, San Diego
10. Tolstoy V.P., Chernyshova I.V., and Skryshevsky V.A. Handbook of Infrared Spectroscopy of Ultrathin Films (2003), John Wiley and Sons, New Jersey
11. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564