Growth and surface morphology of textured NiO thin films deposited by off-axis RF magnetron sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 8 A, 2004, Pages 5524-5525

  Ryu, Hyun Wook ^a   Choi, Gwang Pyo ^a   Hong, Gwang Jun ^a   Park, Jin Seong ^a  

^a Chosun University   (South Korea)

Author keywords

Magnetron sputtering; NiO thin film; Surface morphology; Textured structure

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; CRYSTAL STRUCTURE; CRYSTALLIZATION; MAGNETRON SPUTTERING; MORPHOLOGY; NICKEL COMPOUNDS; SINTERING; X RAY DIFFRACTION ANALYSIS;

DEPOSITION TECHNIQUES; SPUTTERING GAS; STRAIN ENERGY; TEXTURED STRUCTURES;

THIN FILMS;

EID: 6344254831     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5524     Document Type: Article

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