The modeling and experiments of a PVDF mirco-force sensor

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 60-64

  Liu, Yiyang ^a,b   Yu, Peng ^a   Wang, Yuechao ^a   Dong, Zaili ^a   Xi, Ning ^a  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Micro force; Microassembly; PVDF; Sensor

Indexed keywords

EXPERIMENTS; MICROMANIPULATORS; OPTICAL DESIGN; PHOTORESISTS; SURFACE CHEMISTRY; SURFACE TENSION;

BATCH ASSEMBLY; FORCE SENSORS; HIGHLY SENSITIVE; INTERNATIONAL CONFERENCES; MICRO DEVICES; MICRO FORCES; MICRO MANIPULATIONS; MICRO-FORCE; MICROASSEMBLY; MODELING METHODS; MOLECULAR SYSTEMS; POLY-VINYLIDENE FLUORIDE; PROBE TIPS; PVDF; SENSOR; TRANSFORMATION MODELING;

SENSORS;

EID: 50249183031     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484286     Document Type: Conference Paper

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