Gate-first processed FUSI/HfO2/HfSiOX/Si MOSFETs with EOT=0.5 nm - Interfacial layer formation by cycle-by-cycle deposition and annealing

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 523-526

  Takahashi, M ^a   Ogawa, A ^a   Hirano, A ^a   Kamimuta, Y ^a   Watanabe, Y ^a   Iwamoto, K ^a   Migita, S ^a   Yasuda, N ^a   Ota, H ^a   Nabatame, ^a   Toriumi, A ^a,b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HAFNIUM COMPOUNDS; OPTICAL DESIGN;

ELECTRON DEVICES;

EID: 50249096253     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418990     Document Type: Conference Paper

References (11)

1. International Technology Roadmap for Semiconductors, (2006).
2. A. Ogawa, K. Iwamoto, H. Ota, Y. Morita, M. Ikeda, T. Nabatame, and A. Toriumi, Microelectronic Engineering 84 (2007) 1861.
3. M. Suzuki, M. Tomita, T. Yamaguchi, and N. Fukushima, EDM Tech. Dig. (2005) 445.
4. K. Iwamoto, A. Ogawa, T. Nabatame, H. Satake, and A. Toriumi, Microelectronic Engineering 80 (2005) 202.
5. T. Nabatame, K. Iwamoto, H. Ota, K. Tominaga, H. Hisamatsu, T. Yasuda, K. Yamamoto, W. Mizubayashi, Y. Morita, N. Yasuda, M. Ohno, T. Horikawa, and A. Toriumi, Symp. VLSI Tech. (2003) 25.
6. N. Yasuda, H. Ota, T. Horikawa, T. Nabatame, H. Satake, A. Toriumi, Y. Tamura, T. Sasaki, and F. Ootsuka, SSDM Ext. Abst. (2005) 250.
7. Y. Akasaka, K. Miyagawa, T. Sasaki, K. Shiraishi, S. Kamiyama, O. Ogawa, F. Ootsuka, and Y. Nara, Symp. VLSI Tech. (2005) 228.
8. Y. Akasaka, K. Shiraishi, N. Umezawa, O. Ogawa, T. Kasuya, T. Chikyow, F. Ootsuka, Y. Nara, and K. Nakamura, Symp. VLSI Tech. (2006) 206.
9. H. N. Alshareef, H. R. Harris, H. C. Wen, C. S. Park, C. Huffman, K. Choi, H. F. Luan, P. Majhi, B. H. Lee, R. Jammy, D. J. Lichtenwalner, J. S. Jur, and A. I. Kingon, Symp. VLSI Tech. (2006) 10.
10. M. A. Quevedo-Lopez, S. A. Krishnan, P. D. Kirsch, H. J. Li, J. H. Sim, C. Huffman, J.J. Peterson, B. H. Lee, G. Pant, B. E. Gnade, M. J. Kim, R. M. Wallace, D. Guo, H. Bu, and T. P. Ma, EDM Tech. Dig. (2005) 437.
11. P. D. Kirsch, M. A. Quevedo-Lopez, S. A. Krishnan, C. Krug, H. AlShareef, C. S. Park R. Harris, N. Moumen, A. Neugroschel, G. Bersuker, B. H. Lee, J. G. Wang, G. Pant, B. E. Gnade, M. J. Kim, R. M. Wallace, J. S. Jur, D. J. Lichtenwalner, A. I. Kingon, and R. Jammy, EDM Tech. Dig. (2006) 629.