Glow discharge optical emission spectrometry - Activities and opportunities in the field of depth profile analysis

ISIJ International

Volumn 42, Issue SUPPL., 2002, Pages

  Bengtson, Arne ^a   Hänström, Sofia ^a  

^a SWEREA KIMAB   (Sweden)

Author keywords

Depth profiling; Glow discharges; Metallic coatings; Non conductive coatings; Optical emission; Radio frequency; Standardisation; Thin films

Indexed keywords

ALUMINUM; COATINGS; DEPTH INDICATORS; GLOW DISCHARGES; THIN FILMS; ZINC;

GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD-OES);

LIGHT EMISSION;

EID: 0036274281     PISSN: 09151559     EISSN: None     Source Type: Journal    
DOI: 10.2355/isijinternational.42.suppl_s82     Document Type: Review

References (12)