A new neural recording electrode array with parylene insulating layer

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn 1, Issue , 2005, Pages 675-677

  Pang, Changlin ^a   G cham, Jorge ^a   Nenadic, Zoran ^a   Tai, Yu Chong ^a   Burdick, Joel W ^a   Andersen, Richard A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Neural probe; Neural prosthesis; Parylene

Indexed keywords

BIOCOMPATIBILITY; CHEMICAL ANALYSIS; MECHANICAL PROPERTIES; NEURAL PROSTHESES; PROBES; SILICON NITRIDE; SILICON WAFERS;

DEPOSITION PROCESS; DRY ETCHING PROCESS; ELECTRICAL AND MECHANICAL PROPERTIES; HIGH-ELECTRICAL RESISTIVITIES; INORGANIC MATERIALS; MECHANICAL FLEXIBILITY; NEURAL PROBES; PARYLENES;

ELECTRODES;

EID: 50149094675     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Andersen, R.A., et al., Cognitive neural prosthetics. Trends in Cognitive Sciences, 2004. 8(11): p. 486.
2. Wise, K.D., et al., Wireless implantable microsystems: high-density electronic interfaces to the nervous system. Proceedings of the IEEE, 2004. 92(1): p. 76.
3. Norlin, P., et al., A 32-site neural recording probe fabricated by DRIE of SOI substrates. Journal of Micromechanics and Microengineering, 2002. 12: p. 414-419.
4. Xu, C., et al., Design and fabrication of a high-density metal microelectrode array for neural recording. Sensors and Actuators A: Physical, 2002. 96(1): p. 78.