A large-aperture, piston-tip-tilt micromirror for optical phase array applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 754-757

  Wu, L ^a   Maley, S B ^b   Dooley, S R ^b   Nelson, T R ^b   McManamon, P F ^b   Xie, H ^a  

^a UNIVERSITY OF FLORIDA   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL DESIGN; REACTIVE ION ETCHING;

INTERNATIONAL CONFERENCES; LARGE APERTURES; MEMS MIRRORS; MICRO MIRRORS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MIRROR ARRAYS; OPTICAL APERTURES; OPTICAL PHASE; TIP-TILT;

MEMS;

EID: 50149094875     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443766     Document Type: Conference Paper

References (7)

1. P.F. McManamon, "Agile Nonmechanical Beam Steering", Optics & Photonics News (OPN), vol. 17 (2006), pp. 20-25.
2. I.W. Jung, U. Krishnamoorthy, and O. Solgaard, "High Fill-Factor Two-Axis Gimbaled Tip-Tilt-Piston Micromirror Array Actuated by Self-Aligned Vertical Electrostatic Combdrives", JMEMS, vol. 15 (2006), pp. 563-571.
3. V. Milanović, K. Castelino, and D. McCormick, "Fully- Functional Tip-Tilt-Piston Micromirror array", in Digest Tech. Papers IEEE/LEOS Optical MEMS' 06 Conference, Bigsky, August 2006, pp. 38-39.
4. M. A. Helmbrecht and T. Juneau, "Piston-Tip-Tilt Positioning of a Segmented MEMS Deformable Mirrror", Proc. of SPIE, vol. 6467, 64670M, (2007).
5. T. Overstolz, W. Noell, R. Stanley, and N. F. de Rooij, "Compact and Stress-Released Piston Tip-Tilt Mirror", in Digest Tech. Papers IEEE MEMS' 06 Conference, Istanbul, January 2006, pp. 758-761.
6. A. Jain and H. Xie, "A Single-Crystal Silicon Micromirror for Large Bi-directional 2D Scanning Applications", Sensors & Actuators A 130 (2006), pp. 454-460.
7. L. Wu and H. Xie, "A Lateral-Shift-Free and Large-Vertical- Displacement Electrothermal Actuator for Scanning Micromirror/lens", in Digest Tech. Papers Transducers' 07 Conference, Lyon, June 2007, pp.1075-1078.