Resonant magnetic microsensor with μT resolution

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 944-947

  Brugger, S ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; COMPOSITE MICROMECHANICS; CONCENTRATION (PROCESS); EXCIMER LASERS; GAS LASERS; GEOMAGNETISM; KRYPTON; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MAGNETIC MATERIALS; MAGNETISM; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NANOSENSORS; NONMETALS; OPTICAL DESIGN; PAINTING; PHOTORESISTS; REACTIVE ION ETCHING; RESINS; SENSORS; SILICON; SILICON ON INSULATOR TECHNOLOGY;

APPLICATIONS.; DEVICE CHARACTERIZATION; DEVICE FABRICATIONS; EARTH MAGNETIC FIELD; ELECTROSTATICALLY DRIVEN; HIGH SENSITIVITIES; INTERNATIONAL CONFERENCES; KRF EXCIMER LASERS; MAGNETIC CONCENTRATOR; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MECHANICAL RESONATORS; NARROW GAPS; NEW DEVICES; SENSOR ORIENTATION; SOFT MAGNETIC RIBBONS;

COMPASSES (MAGNETIC);

EID: 50149093678     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443813     Document Type: Conference Paper

References (10)

1. P.M. Drljača, F. Vincent, P.-A. Besse and R.S. Popović, "Design of planar magnetic concentrators for high sensitivity Hall devices," Sens. Actuators A, vol. 97-98, pp. 10-14, 2002.
2. C. Schott, R. Racz and S. Huber, "Smart CMOS sensors with integrated magnetic concentrators," Proc. of IEEE Sensors 05, Irvine, CA, USA, Oct. 31 - Nov. 3, 2005, pp. 959-962.
3. C. Schott, R. Racz and S. Huber, "CMOS three axis Hall sensor and joystick application", Proc. of IEEE Sensors 04, Vienna, Austria, Oct. 24-27, 2004, vol. 2, pp. 977-980.
4. P.M. Drljača, F. Vincent, P. Kejik and R.S. Popović, "Advanced process of the magnetic core integration for the micro fluxgate magnetometer," Sens. Actuators A, vol. 129, pp. 58-61, 2006.
5. R.S. Popović, P.M. Drljača and P. Kejik, "CMOS magnetic sensors with integrated ferromagnetic parts," Sens. Actuators A, vol. 129, pp. 94-99, 2006.
6. S. Brugger, P. Simon and O. Paul, "Field concentrator based resonant magnetic sensor," Proc. IEEE Sensors 06, Daegu, Korea, Oct. 22-25, 2006, pp. 1016-1019.
7. S. Brugger and O. Paul, "Geometric Optimization and Microstructuring of Magnetic Concentrators for a Resonant Magnetic Sensor," Dig. Tech. Papers Transducers 07, Lyon, France, June 10-14, 2007, pp. 2377-2380.
8. R. Sunier, T. Vancura, Y. Li, K.-U. Kirstein, H. Baltes and O. Brand, "Resonant Magnetic Field Sensor With Frequency Output," J. Micromech. Microeng., vol. 15, no. 5, pp. 1098-1107, 2006.
9. B. Bahreyni and C. Shafai, "A micromachined magnetometer with frequency modulation at the output," Proc. of IEEE Sensors 05, Irvine, CA, USA, Oct. 31 - Nov. 3, 2005, pp. 580-583.
10. S. Choi, S.-H. Kim, Y.-K. Yoon and M.G. Allen, "A Magnetically Excited and Sensed MEMS-Based Resonant Compass," Trans. Magnetics, vol. 42, no. 10, pp. 3506-3508, 2006.