Geometric optimization and microstructuring of magnetic concentrators for a resonant magnetic sensor

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2377-2380

  Brugger, S ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Laser; Magnetic concentrator; Magnetic sensor; Resonator

Indexed keywords

ACTUATORS; CONCENTRATION (PROCESS); ETCHING; FINITE ELEMENT METHOD; ION BOMBARDMENT; LASER BEAM CUTTING; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MAGNETIC SENSORS; MICROSYSTEMS; OPTICAL DESIGN; OPTIMIZATION; RESONANCE; SENSITIVITY ANALYSIS; SENSORS; THREE DIMENSIONAL; TRANSDUCERS;

AQUA REGIA; COMSOL MULTIPHYSICS; DESIGN AND ANALYSIS; FINITE ELEMENT SIMULATIONS; GEOMETRIC OPTIMIZATION; INTERNATIONAL CONFERENCES; ION-BEAM ETCHING; LASER; LASER CUTTINGS; MAGNETIC CONCENTRATOR; MAGNETIC FIELD CONCENTRATOR; MAGNETIC FIELD DEPENDENCES; MAGNETIC FORCES; MAGNETIC SENSOR; MECHANICAL RESONATORS; MICROSTRUCTURING; PHYSICAL MODEL; PLANAR CONCENTRATORS; RESONANCE FREQUENCIES; RESONANT SENSORS; RESONATOR; SOFT MAGNETIC; SOLID-STATE SENSORS; TWO GAPS; WET-ETCHING;

MAGNETIC MATERIALS;

EID: 50049129585     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300648     Document Type: Conference Paper

References (6)

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