Advanced process of the magnetic core integration for the micro fluxgate magnetometer

Sensors and Actuators, A: Physical

Volumn 129, Issue 1-2 SPEC. ISS., 2006, Pages 58-61

  Drljača, Predrag M ^a   Vincent, Franck ^a   Kejík, Pavel ^a   Popović, Radivoje S ^a  

^a EPFL   (Switzerland)

Author keywords

CMOS; Ferromagnetic material; Fluxgate; Hysteresis; Technology

Indexed keywords

ANNEALING; CMOS INTEGRATED CIRCUITS; EDDY CURRENTS; FERROMAGNETIC MATERIALS; HYSTERESIS; MAGNETIC FIELD EFFECTS; MAGNETIC FLUX; SENSORS;

CHEMICAL THINNING; FLUXGATES; MAGNETIC CORE INTEGRATION; MAGNETIC SENSORS;

MAGNETOMETERS;

EID: 33646271348     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.09.045     Document Type: Article

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