Addressable fluidic gate arrays for layer-to-layer parallel fluidic transportation system

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 543-546

  Morimoto, Takashi ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FLUIDIC DEVICES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; WELL TESTING;

BI-STABLE; FLUIDIC SYSTEMS; GATE ARRAYS; IN-PLANE; INTERNATIONAL CONFERENCES; MEMORY FUNCTIONS; MICRO-ELECTRO MECHANICAL SYSTEMS; NETWORK SYSTEMS; PNEUMATIC PRESSURE; TRANSPORTATION SYSTEMS;

VALVES (MECHANICAL);

EID: 50149088847     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443713     Document Type: Conference Paper

References (8)

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