Self-generated peristaltic motion of cascaded diaphragm actuators for micro fluidic systems

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 135-138

  Jeong, Ok Chan ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PUMPS; REACTIVE ION ETCHING;

INTERNATIONAL CONFERENCES; MICRO CHANNELS; MICRO FLUIDIC SYSTEMS; MICRO PUMPING; MICRO-ELECTRO MECHANICAL SYSTEMS; OPERATIONAL MODES; PERISTALTIC MOTION; PERISTALTIC PUMPING; STATIC DEFORMATIONS; TIME DELAY EFFECTS; WORKING PRINCIPLES;

DIAPHRAGMS;

EID: 40949094320     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. T. Thorsen, S. J. Maerkl, S. R. Quake, "Microfluidic Large Scale Integration", Science 298, pp. 580-584, 2002.
2. W. H. Graver, R. H. C. Ivester, E. C. Jensen, and R. A. Mathies, "Development and Multiplexed control of Latching Pneumatic Valves using Microfluidic Logical Structures", Vol. 6, pp. 623-631, 2006.
3. W. H. Graver, E. C. Jensen, R. H. C. Ivester, and R. A. Mathies, "Programmable Pneumatic Logical Circuits for Microfluidic Device Control", Proc. MicroTAS 2006, Japan, Oct. 5-9, pp. 506-508, 2006.
4. D. Kim, N. C. Chesler, and D. J. Beebe, "A method for Dynamic System Characterization using Hydraulic Series Resistance", Lab Chip, Vol. 6, pp. 639-644, 2006.
5. M. Brivio, N. Tas, M. H. Goedbloed, Han J. G. E. Gardeniers, W. Verboom, A. van den Berg and D. N. Reinhoudt, "A MALDI-chip Integrated System with A Monitoring Window", Lab Chip, Vol. 5, pp. 378-381, 2005.
6. O. C. Jeong and S. Konishi, "Fabrication and Drive Test of Pneumatic PDMS Micropump", Sensors and Actuators A, in press.