Effect of the sputtering parameters on the growth and piezoelectric properties of zinc oxide thin films

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 213-216

  Kutepova, V P ^a   Hall, D A ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ALUMINUM; DIELECTRIC FILMS; ELECTRODES; FILM GROWTH; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SENSORS; SILICA; SILICON; THIN FILMS; ZINC OXIDE;

SURFACE ACOUSTIC WAVE SENSORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0032271749     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (0)