In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 497-500

  Pham, Hoa T M ^a   Wei, Jia ^a   De Boer, Charles R ^a   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Anisotropic etching; Brownian ratchet; DRIE; Drift ratchet; Isotropic etching

Indexed keywords

ACTUATORS; ANISOTROPY; ELECTRON BEAM LITHOGRAPHY; ETCHING; MICROSYSTEMS; NONMETALS; SENSORS; SILICON; SILICON WAFERS; TRANSDUCERS;

ANISOTROPIC ETCHING; BROWNIAN RATCHET; BROWNIAN RATCHETS; DEEP-REACTIVE ION ETCHING; DRIE; DRIFT RATCHET; ETCH RATES; ETCHING PROCESSES; IN-SITU; INTERNATIONAL CONFERENCES; ISOTROPIC ETCHING; PORE DIAMETERS; SMALL SIZE; SOLID-STATE SENSORS;

REACTIVE ION ETCHING;

EID: 50049112462     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300176     Document Type: Conference Paper

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