On-chip scanning confocal microscope with 3D MEMS scanner and VCSEL feedback detection

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2561-2564

  Gorecki, C ^a   Nieradko, L ^a   Bargiel, S ^a,b   Dziuban, J ^a,b   Henis, D ^a   Sylvestre, J A ^a   Alkowska, K ^a   Soto Romero, G ^a   Thevenet, J ^a   Yahiaoui, R ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Comb drive actuator; Confocal microscopy; Optical MEMS; Reflow microlens

Indexed keywords

ACTUATORS; FEEDBACK; MICROLENSES; MICROSCOPES; MICROSYSTEMS; SENSORS; SURFACE EMITTING LASERS; TRANSDUCERS;

3-D MEMS; ACTIVE DETECTION; CHIP-SCALE; COMB-DRIVE ACTUATOR; CONFOCAL MICROSCOPY; FEEDBACK DETECTION; FOCAL LENGTHS; INTERNATIONAL CONFERENCES; MICRO LENSING; MICROOPTICAL; ON CHIPS; OPTICAL MEMS; OPTICAL-; RASTER SCANNING; REFLOW MICROLENS; SCANNING CONFOCAL MICROSCOPE; SOLID-STATE SENSORS; VERTICAL MOTIONS;

SCANNING;

EID: 50049109396     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300694     Document Type: Conference Paper

References (4)

1. S. Kwon and L.P. Lee, "Micromachined transmissive scanning confocal microscope", Optics Lett, vol. 29, pp. 706-709, 2004.
2. S Bargiel, L Nieradko, M Józwik, C Gorecki, J.A Dziuban, "New generation of fully integrated optical microscopes on-chip: application to confocal microscope", Proc. SPIE, vol. 6186, 2006.
3. D. Heinis, C. Gorecki, "Feedback-induced voltage change of Vertical Cavity Surface Emitting Laser as an active detection system for miniature optical scanning probe microscopes », Optics Express, vol. 14, pp. 3396-3405, 2006.
4. R. Carrasco, J.A. Dziuban, I. Moreno, C. Gorecki, R. Walczak, M. Kopytko, L. Nieradko, M. Józwik, "Optical microlenses for MOEMS" Proc. SPIE, vol. 5836, pp. 657-666, 2005.