Optical microlenses for MOEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 657-666

  Carasco, Roberto ^a   Dziuban, Jan A ^b   Moreno, Ignacio ^a   Gorecki, Christophe ^b   Nieradko, Lukasz ^b   Walczak, Rafal ^c   Kopytko, Malgorzata ^c   Jozwik, Michal ^b  

^a MIGUEL HERNÁNDEZ UNIVERSITY   (Spain)

^b FEMTO ST INSTITUTE   (France)

^c WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Anodic bonding; Glass; Microlens; Micromachining; Silicon; Wet anisotropic etching

Indexed keywords

ANISOTROPY; ANODES; CHEMICAL BONDS; OPTICAL DEVICES; VACUUM;

ANODIC BONDING; MICROLENS; WET ANISOTROPIC ETCHING;

LENSES;

EID: 28444487448     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607912     Document Type: Conference Paper

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