SCOPUS 정보 검색 플랫폼

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1311-1315

Fabrication of large area diffraction grating using LIGA process

(6) Noda, Daiji a Tanaka, Makoto a Shimada, Kazuma a Yashiro, Wataru b Momose, Atsushi b Hattori, Tadashi a

a UNIVERSITY OF HYOGO (Japan)

b UNIVERSITY OF TOKYO (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BIOLOGICAL MATERIALS; DIFFRACTION; IMAGING TECHNIQUES; INTERFEROMETERS; INTERFEROMETRY; LITHOGRAPHY; MEDICAL APPLICATIONS; MEDICAL IMAGING; OPTICAL DESIGN; OPTICAL INSTRUMENTS; PHOTORESISTS; PRESSURE DROP; X RAY ANALYSIS; X RAY LITHOGRAPHY; X RAYS;

ABSORBANCE; DEEP X-RAY LITHOGRAPHY; EFFECTIVE AREA; HIGH ASPECT RATIO; HIGH-ACCURACY; HIGH-RESOLUTION IMAGING; HIGH-RESOLUTION X-RAY; LARGE EFFECTIVE AREA; LIGA PROCESS; MATERIAL SCIENCES; PRACTICAL USE; X-RAY IMAGING;

DIFFRACTION GRATINGS;

ASSEMBLY; DIFFRACTION; IMAGE ANALYSIS; INTERFEROMETRY; LITHOGRAPHY; PRESSURE GRADIENT; X RAY ANALYSIS;

EID: 49949087137 PISSN: 09467076 EISSN: None Source Type: Journal
DOI: 10.1007/s00542-008-0584-5 Document Type: Conference Paper

Times cited : (65)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.