Determination of mean free path for energy loss and surface oxide film thickness using convergent beam electron diffraction and thickness mapping: A case study using Si and P91 steel

Journal of Microscopy

Volumn 224, Issue 2, 2006, Pages 187-196

  Mitchell, D R G ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

CBED; Mean free path; P91; Si; Surface oxide; Thickness determination

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; ELECTRON DIFFRACTION; ELECTRONS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAPPING; OXIDE FILMS; SILICON COMPOUNDS;

CBED; CONVERGENT BEAMS; MEAN-FREE PATH; P91 STEEL; SI; SI STEELS; SURFACE OXIDE; THICKNESS DETERMINATION; THICKNESS MAP; TRANSMISSION ELECTRON;

ENERGY DISSIPATION;

SILICON; STEEL;

ACCURACY; ARTICLE; CASE STUDY; CHEMICAL STRUCTURE; CORRELATION ANALYSIS; DYNAMICS; ELECTRON DIFFRACTION; ELECTRON ENERGY LOSS SPECTROSCOPY; PATH ANALYSIS; PRIORITY JOURNAL; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 33845756215     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2006.01690.x     Document Type: Article

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