Transparent polymer and diamond-like hydrogenated amorphous carbon thin films by PECVD technique

Journal of Physics D: Applied Physics

Volumn 41, Issue 15, 2008, Pages

  Goswami, Romyani ^a   Jana, Tapati ^a   Ray, Swati ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; AMORPHOUS CARBON; CARBON FILMS; CHEMICAL PROPERTIES; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRIC RESISTANCE; HYDROGEN; HYDROGENATION; HYDROGENOLYSIS; LIGHTING; NONMETALS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMER FILMS; THICK FILMS;

CHEMICAL VAPOUR DEPOSITION; DIAMOND-LIKE; ELECTRICAL AND STRUCTURAL PROPERTIES; ELECTRICAL RESISTIVITIES; HYDROGENATED AMORPHOUS CARBON; HYDROGENATED AMORPHOUS CARBON FILMS; LOW-SUBSTRATE TEMPERATURE; OPTICAL-; RADIO FREQUENCY PLASMAS; TRANSPARENT POLYMERS;

AMORPHOUS FILMS;

EID: 49749130838     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/15/155413     Document Type: Article

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