Silicon oxide thin films prepared by a photo-chemical vapour deposition technique

Journal of Materials Science

Volumn 32, Issue 18, 1997, Pages 4895-4900

  Jana, T ^a   Ghosh, S ^a   Ray, S ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; PHOTOCHEMICAL REACTIONS; REFRACTIVE INDEX;

PHOTOCHEMICAL VAPOR DEPOSITION; SILICA FILMS;

SILICA;

EID: 0031224640     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018616022092     Document Type: Article

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