Transport theory of sputtering I: Depth of origin of sputtered atoms

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 149, Issue 3, 1999, Pages 272-284

  Zhang, Zhu Lin ^a  

^a ANHUI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COMPUTER SIMULATION; TARGETS; TRANSPORT PROPERTIES;

TRANSPORT THEORY;

SPUTTERING;

EID: 0033076898     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00634-X     Document Type: Article

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