Detection and verification of silicide pipe defects on SOI technology using voltage contrast inspection

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2007, Pages 270-274

  Patterson, Oliver D ^a   Kang, Hyoung H ^a   Strane, Jay ^a   Lavoie, Christian ^a   Barth, Karl ^a   Ouyang, Xu ^a   Wu, Kevin ^b  

^a IBM   (United States)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IN-LINE; INTERNATIONAL SYMPOSIUM; PIPE DEFECTS; PIPE DETECTION; SOI TECHNOLOGY; TEST STRUCTURES; VOLTAGE CONTRAST;

FAILURE ANALYSIS; PIPE; QUALITY ASSURANCE; SAFETY FACTOR; TECHNOLOGY; TESTING; VOLTAGE MEASUREMENT;

RELIABILITY;

EID: 49649086070     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. O. D. Patterson, J. L. Drown, B. D. Crevasse, A. Salah, K. K. Harris, "Real Time Fault Site Isolation of Front-end Defects in ULSI-ESRAM Utilizing In-Line Passive Voltage Contrast Analysis", Proceedings of ISTFA, Nov 2002, pp. 591-599.
2. Patterson, O. D., Wu, K., Mocuta, D., Nafisi, K., "Test Structure and e-Beam Inspection Methodology for In-line Detection of (Non-visual) Missing Spacer Defects", Proceedings of ASMC, 2007.
3. R. Guldi, J. Shaw, J. Ritchison, S. Oestreich, K. Davis, R. Fiordalice, "Characterization of Copper Voids in Dual Damascene Processes", Proceedings of ASMC, April 2002.
4. O. Moreau, A. Kang, V. Mantovani, I. Mica, M.L. Polignano, L. Avaro, C. Pastore, G. Pavia, Early detection of crystal defects in the device process flow by electron beam inspection", Proceedings of ASMC, 2006, pp. 334-339.
5. K.H. Weiner, G Verma, P. Nunan, I. De, "Apparatus and methods for determining and localization of failures in test structures using voltage contrast", Patent US6861666, 2002.