Structural analysis of threading dislocations in AlN thin films

Microscopy and Microanalysis

Volumn 14, Issue SUPPL. 2, 2008, Pages 258-259

  Tokumoto, Y ^a   Shibata, N ^a   Mizoguchi, T ^a   Yamamoto, T ^a   Ikuhara, Y ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 49549125645     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S143192760808433X     Document Type: Conference Paper

References (4)

1. X. J. Ning et al., J. Mater. Res. 11 (1996) 580.
2. Y. Tokumoto et al., J. Mater. Sci. 41 (2006) 2553.
3. Y. Tokumoto et al., J. Ceram. Soc. Japan 114 (2006) 1018.
4. This work was supported in part by the Grant-in-Aid for Scientific Research on Priority Areas "Nano Materials Science for Atomic-scale Modification" (no 19053001) from the Ministry of Education, Culture, Sports and Technology (MEXT) of Japan. Y. T. is supported as a Japan Society for the Promotion of Science (JSPS) research fellow. N.S. acknowledges support from PRESTO, Japan Science and Technology Agency.