The role of SiO2 buffer layer in the growth of highly textured LiNbO3 thin film upon SiO2/Si by pulsed laser deposition

Materials Letters

Volumn 58, Issue 27-28, 2004, Pages 3597-3600

  Wang, Xinchang ^a   Ye, Zhizhen ^a   He, Junhui ^b   Cao, Liangliang ^a   Zhao, Binghui ^a  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

LiNbO3; Pulsed laser deposition; Silicon substrate; Thin film

Indexed keywords

CRYSTALLINE MATERIALS; INTERFACES (MATERIALS); LITHIUM COMPOUNDS; OPTICAL WAVEGUIDES; OXIDATION; PRISMS; PULSED LASER DEPOSITION; THIN FILMS;

BUFFER LAYERS; LINBO3; SILICON SUBSTRATE; SMOOTH SURFACES;

SILICA;

EID: 4944267268     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2004.06.059     Document Type: Article

References (18)

1. R.S. Weis, T.K. Gaylord, Appl. Phys., A 37 (1985) 191.
2. V. Bornand, I. Huet, Mater. Chem. Phys. 77 (2002) 571.
3. E. Dogheche, X. Lansiaux, D. Remiens, J. Appl. Phys. 93 (2003) 1165.
4. R.S. Feigelson, J. Cryst. Growth 166 (1996) 1.
5. S.Y. Lee, R.S. Feigelson, J. Cryst. Growth 186 (1998) 594.
6. A. Yamada, H. Tamada, M. Saitoh, J. Appl. Phys. 76 (3) (1994) 1776.
7. K. Kaigawa, Y. Yamamura, Y. Kumazawa, T. Kawaguchi, M. Imaeda, H. Sakai, T. Tsurumi, J. Cryst. Growth 244 (2002) 70.
8. K. Matsubara, S. Niki, M. Watanabe, P. Fons, K. Iwata, A. Yzmada, Appl. Phys., A 69 (1999) 679 (Suppl.).
9. R.-H. Kim, H.-H. Park, G.-T. Joo, Appl. Surf. Sci. 169-170 (2001) 564.
10. J.-G. Yoon, K. Kim, Appl. Phys. Lett. 68 (18, 29) (1996) 2523.
11. X.C. Wang, J.H. He, J.Y. Huang, B.H. Zhao, Z.Z. Ye, J. Mater. Sci. Lett 22 (2003) 225.
12. G.H. Lee, B.C. Shin, B.H. Min, Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 95 (2002) 137.
13. Y. Kakehi, A. Okamoto, Y. Sakurai, Y. Nishikawa, T. Yotsuya, S. Ogawa, Appl. Surf. Sci. 169-170 (2001) 560.
14. F.J. Gordillo-Vázque, C.N. Afonso, J. Appl. Phys. 92 (2002) 7651.
15. A. Tanaka, K. Miyashita, T. Tashiro, M. Kimura, T. Sukegawa, J. Cryst. Growth 148 (1995) 324.
16. W.S. Hu, Z.G. Liu, Y.-Q. Lu, S.N. Zhu, D. Feng, Opt. Lett. 21 (1996) 946.
17. C.H.-J. Huang, T.A. Rabson, Opt. Lett. 18 (1993) 811.
18. S.Y. Lee, R.S. Feigelson, J. Mater. Res. 14 (6) (1999) 2662.