|
Volumn 77, Issue 2, 2003, Pages 571-577
|
LiNbO3 thin films deposited on Si substrates: A morphological development study
|
Author keywords
LiNbO3 thin films; Lithium niobate; Pyrosol; r.f. Sputtering; Silicon substrate; Two step growth
|
Indexed keywords
CRYSTAL ORIENTATION;
FILM GROWTH;
LITHIUM NIOBATE;
MORPHOLOGY;
NUCLEATION;
PYROLYSIS;
SILICA;
SPRAYING;
SPUTTER DEPOSITION;
SUBSTRATES;
TEXTURES;
RADIO FREQUENCY (RF) SPUTTERING;
SPRAY PYROLYSIS;
THIN FILMS;
|
EID: 0037437436
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/S0254-0584(02)00107-4 Document Type: Article |
Times cited : (18)
|
References (28)
|