Interface recombination velocity measurement by a contactless microwave technique

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 4, 2004, Pages 2063-2067

  Ahrenkiel, R K ^a   Dashdorj, J ^a,b  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b Department of Geology and Geological Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVE POWER REFLECTION; OPTICAL PARAMETRIC OSCILLATOR (OPO); RESONANT-COUPLED PHOTOCONDUCTIVE DECAY (RCPCD); SURFACE RECOMBINATION VELOCITY (SRV);

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; DIFFERENTIAL EQUATIONS; ELECTRIC IMPEDANCE; INTEGRATION; LAPLACE TRANSFORMS; LIGHT ABSORPTION; MAGNETOELECTRIC EFFECTS; MICROWAVE ANTENNAS; NATURAL FREQUENCIES; PHOTOCONDUCTIVITY; PHOTOLUMINESCENCE; SILICON; SILICON WAFERS;

VELOCITY MEASUREMENT;

EID: 4944246200     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1768523     Document Type: Conference Paper

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