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Image formation with an achromatic interferometer
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Fringe formation in incoherent light with a two-grating interferometer
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Talbot interferometry with increased shear
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Effects of unparallel grating planes in Talbot interferometry
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White-light spatial frequency multiplication using soft x-rays
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First performance results of the ASML alpha demo tool
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Nikon EUVL development progress summary
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33745628743
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Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development
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61510P
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17
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84893953184
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J. Goodman, Introduction to Fourier Optics, second ed, McGraw-Hill, 1968, Eq. 3-74. We note that we have written the propagation phase in terms of angle and wavelength rather than in terms of spatial frequency as done by Goodman. It is for this reason we do not call call the propagation phase a transfer function. We also note that this phase is exact; the Fresnel approximation has not yet been made
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J. Goodman, Introduction to Fourier Optics, second ed. (McGraw-Hill, 1968), Eq. 3-74. We note that we have written the propagation phase in terms of angle and wavelength rather than in terms of spatial frequency as done by Goodman. It is for this reason we do not call call the propagation phase a transfer function. We also note that this phase is exact; the Fresnel approximation has not yet been made.
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18
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84893902832
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J. Goodman, Introduction to Fourier Optics, second ed. (McGraw-Hill, 1968), Sec. 4.5.2.
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J. Goodman, Introduction to Fourier Optics, second ed. (McGraw-Hill, 1968), Sec. 4.5.2.
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19
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third ed, Addison-Wesley Longman, Eq. 10.61
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E. Hecht, Optics, third ed. (Addison-Wesley Longman, 1998), Eq. 10.61.
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Optics
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Hecht, E.1
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20
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84893901062
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Because the DOF dephasing term is odd in theta we need to use the full NA (2Δ0) to get the full dephasing for the DOF term. The tilt dephasing term is even in theta so only the half NA is required here.
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Because the DOF dephasing term is odd in theta we need to use the full NA (2Δ0) to get the full dephasing for the DOF term. The tilt dephasing term is even in theta so only the half NA is required here.
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21
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84893970449
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Here the small correction term does not contain a small parameter (g, γ, d) so we go to second order to maintain reasonable accuracy in the expansion
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Here the small correction term does not contain a small parameter (g, γ, d) so we go to second order to maintain reasonable accuracy in the expansion.
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