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Volumn 2, Issue , 2007, Pages 353-356

An XPS study on N doped TiO2 sol-gel thin films

Author keywords

Multilayered N doped TiO2; Sol gel; Ti O N chemical bonding; XPS

Indexed keywords

ELECTRIC CONDUCTIVITY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 49149116686     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2007.4519733     Document Type: Conference Paper
Times cited : (4)

References (12)
  • 1
    • 0035965965 scopus 로고    scopus 로고
    • Correlation between processing and properties of TiOxNy thin films sputter deposited by reactive gas pulsing technique
    • N. Martin, O. Banach, A.M.E. Santo, S. Springer, R. Sanjines, J. Takadoum, F. Levy, Correlation between processing and properties of TiOxNy thin films sputter deposited by reactive gas pulsing technique, Appl. Surf Sci. 185, pp. 123-133, 2001.
    • (2001) Appl. Surf Sci , vol.185 , pp. 123-133
    • Martin, N.1    Banach, O.2    Santo, A.M.E.3    Springer, S.4    Sanjines, R.5    Takadoum, J.6    Levy, F.7
  • 3
    • 0031998527 scopus 로고    scopus 로고
    • Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry
    • J.M. Leng, J. Chen, J. Fanton, M. Senko, K. Ritz, J. Opsal, Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry, Thin Solid Films, 313-314, pp. 308-313, 1998.
    • (1998) Thin Solid Films , vol.313-314 , pp. 308-313
    • Leng, J.M.1    Chen, J.2    Fanton, J.3    Senko, M.4    Ritz, K.5    Opsal, J.6
  • 5
    • 0033332743 scopus 로고    scopus 로고
    • Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition
    • A. Bendavid, P.J. Martin, A.E. Jamting, H. Takikawa, Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition, Thin Solid Films, 355-356, pp. 6-11, 1999.
    • (1999) Thin Solid Films , vol.355-356 , pp. 6-11
    • Bendavid, A.1    Martin, P.J.2    Jamting, A.E.3    Takikawa, H.4
  • 6
    • 0035898725 scopus 로고    scopus 로고
    • Characterization of ITO- and TiOXNM films by spectroscopic ellipsometry, spectraphotometry and XPS
    • J. Bartella, J. Schroeder, K. Witting, Characterization of ITO- and TiOXNM films by spectroscopic ellipsometry, spectraphotometry and XPS, Appl. Surf. Sci. 179, pp. 181-190, 2001.
    • (2001) Appl. Surf. Sci , vol.179 , pp. 181-190
    • Bartella, J.1    Schroeder, J.2    Witting, K.3
  • 7
    • 34447295927 scopus 로고    scopus 로고
    • M. Braic, M. Balaceanu, A. Vladescu, A. Kiss, V. Braic, G. Epurescu, G. Dinescu, A. Moldovan, R. Birjega, M. Dinescu, Preparation and characterization of titanium oxy-nitride thin films, Applied Surface Science - in print, doi:10.1016/j.apsusc., 2007.02.179, 2007.
    • M. Braic, M. Balaceanu, A. Vladescu, A. Kiss, V. Braic, G. Epurescu, G. Dinescu, A. Moldovan, R. Birjega, M. Dinescu, Preparation and characterization of titanium oxy-nitride thin films, Applied Surface Science - in print, doi:10.1016/j.apsusc., 2007.02.179, 2007.
  • 8
    • 0035502967 scopus 로고    scopus 로고
    • Optical, electronic and transport properties of nanocrystalline titanium nitride thin films
    • P. Patsalas, S. Logothetidis, Optical, electronic and transport properties of nanocrystalline titanium nitride thin films, J. Appl. Phys., 90(9), pp. 4725-4734, 2001.
    • (2001) J. Appl. Phys , vol.90 , Issue.9 , pp. 4725-4734
    • Patsalas, P.1    Logothetidis, S.2
  • 11
    • 49149085756 scopus 로고
    • D. Briggs and M. P. Seah Eds, J. Wiley & Sons, New-York, p
    • D. Briggs and M. P. Seah Eds., Practical Surface Analysis, Ed. J. Wiley & Sons, New-York, p. 429, 1993.
    • (1993) Practical Surface Analysis, Ed , pp. 429


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.