Stability analysis for the TMS method: Influence of high spatial frequencies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6616, Issue PART 1, 2007, Pages

  Wiegmann, Axel ^a   Elster, Clemens ^a   Geckeler, Ralf D ^a   Schulz, Michael ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Absolute test; Asphere; Interferometry; Optical form measurement; Scanning

Indexed keywords

ANGLE MEASUREMENT; INTERFEROMETRY; OPTICAL COLLIMATORS;

ABSOLUTE TEST; OPTICAL FORM MEASUREMENT; SENSOR ERRORS;

LINEAR STABILITY ANALYSIS;

EID: 36248956671     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726116     Document Type: Conference Paper

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