Optical and microstructural properties of sol-gel TiOxN y thin films

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 2007, Pages 303-306

  Trapalis, Chr ^a   Giannakopoulou, T ^a   Todorova, N ^a   Anastasescu, C ^b   Anastasescu, M ^b   Gartner, M ^b  

^a INSTITUTE OF MATERIALS SCIENCE   (Greece)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

Author keywords

AFM; N doped TiO2; SE; Sol gel

Indexed keywords

ATOMIC FORCE MICROSCOPY; DOPING (ADDITIVES); ENERGY GAP; FILM PREPARATION; NITROGEN COMPOUNDS; OPTICAL PROPERTIES; SELENIUM; SOL-GEL PROCESS; SOL-GELS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TITANIUM DIOXIDE; X RAY DIFFRACTION;

MEAN CLUSTER SIZE; MICRO-STRUCTURAL; MICRO-STRUCTURAL PROPERTIES; N-DOPED; NANOSTRUCTURED SURFACE; PREPARATION METHOD; QUARTZ SUBSTRATE; TITANIUM OXYNITRIDE;

OPTICAL FILMS;

EID: 49149087845     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2007.4519720     Document Type: Conference Paper

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