Synthesis of sub-micron diamond films on Si(100) for thermal applications by BENMPCVD

Materials Research Society Symposium Proceedings

Volumn 956, Issue , 2007, Pages 143-149

  Saada, Samuel ^a   Arnault, Jean Charles ^b   Rocha, Licinio ^a   Bergonzo, Philippe ^a  

^a DIF   (France)

^b CEA SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS CURRENTS; NUCLEATION; SILICON WAFERS; SYNTHESIS (CHEMICAL); TEMPERATURE CONTROL; ULTRATHIN FILMS;

GROWTH STEP; MICRON COVERING DIAMOND FILMS; ROOT-MEAN-SQUARE ROUGHNESS;

DIAMOND FILMS;

EID: 40949089763     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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