Thick DLC films deposited by PECVD on the internal surface of cylindrical substrates

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1613-1621

  Lusk, D ^a   Gore, M ^a   Boardman, W ^b   Casserly, T ^b   Boinapally, K ^b   Oppus, M ^b   Upadhyaya, D ^b   Tudhope, A ^b   Gupta, M ^b   Cao, Y ^b   Lapp, S ^c  

^a Sub One Europe Ltd   (United Kingdom)

^b Sub One Technology   (United States)

^c UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

Author keywords

Chemical vapour deposition; Corrosion; Diamond like carbon; Wear

Indexed keywords

CLADDING (COATING); DEPOSITION RATES; DYNAMIC RANDOM ACCESS STORAGE; ELECTRIC LOAD MANAGEMENT; HYDROCARBONS; MOLECULAR BEAM EPITAXY; ORGANIC COMPOUNDS; PIPE; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMAS; SUBSTRATES; THICKNESS MEASUREMENT;

CHEMICAL VAPOUR DEPOSITION; COATING THICKNESSES; CORROSION; DIAMOND-LIKE CARBON; DIRECT CURRENT; DLC FILMS; HIGH DENSITY PLASMAS; HIGH-DENSITY PLASMA; HIGH-DEPOSITION RATES; HOLLOW-CATHODE EFFECT; HYDROCARBON PRECURSOR; INTERNAL SURFACES; PULSED-POWER; VACUUM CHAMBERS; WEAR;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 48849108906     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.051     Document Type: Article

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