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Volumn 23, Issue 4, 2008, Pages 758-762
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Influence of modulating ratio on friction and wear behavior of TiN/Ti multilayer coatings
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Author keywords
Friction and wear; Layer structure; Multilayer coating; TiN and Ti
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Indexed keywords
ELECTRON BEAM LITHOGRAPHY;
FRICTION;
MICROSCOPES;
MODULATION;
MULTILAYERS;
NANOHARDNESS;
SCANNING ELECTRON MICROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
TRIBOLOGY;
VACUUM APPLICATIONS;
VACUUM DEPOSITION;
VACUUM TECHNOLOGY;
DEPOSITION METHODS;
ELASTIC MODULES;
FILM STRUCTURES;
FILTERED CATHODE VACUUM ARC;
FRICTION AND WEAR;
FRICTION AND WEAR BEHAVIORS;
LAMINATE STRUCTURES;
LAYER STRUCTURE;
MULTI-LAYER COATINGS;
MULTILAYER COATING;
NANO-INDENTER;
SCANNING ELECTRON MICROSCOPE;
TIN AND TI;
TRANSMISSION ELECTRON MICROSCOPE;
WEAR BEHAVIORS;
COATINGS;
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EID: 48549105268
PISSN: 1000324X
EISSN: None
Source Type: Journal
DOI: 10.3724/SP.J.1077.2008.00758 Document Type: Article |
Times cited : (6)
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References (18)
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