Design and fabrication of a thermal infrared emitter

Sensors and Actuators, A: Physical

Volumn 55, Issue 1, 1996, Pages 57-63

  Bauer, D ^a   Heeger, M ^a   Gebhard, M ^a   Benecke, W ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Finite element method; Non dispersive infrared gas analysis; Thermal infrared emitter

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; METALLIZING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SPUTTER DEPOSITION;

ALUMINUM SPUTTERING; FRESNEL ZONE PLATE; NONDISPERSIVE INFRARED (NDIR) GAS ANALYSIS; THERMAL HEATER; THERMAL INFRARED EMITTER;

INFRARED DEVICES;

EID: 0030182494     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01250-2     Document Type: Article

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