A bidirectional readout integrated circuit (ROIC) with capacitance-to-time conversion operation for high performance capacitive MEMS accelerometers

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 288-291

  Lee, Sungsik ^a   Lee, Myunglae ^a   Jung, Sunghae ^a   Je, Changhan ^a   Park, Jiman ^a   Hwang, Gunn ^a   Choi, Changauck ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPOSITE MICROMECHANICS; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; INTEGRATED CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORS;

CONVERSION OPERATIONS; DIGITAL CONVERSIONS; MEMS ACCELEROMETERS; READ OUT INTEGRATED CIRCUITS; READOUT OPERATIONS; REFERENCE CAPACITANCES; SENSOR CAPACITANCES;

CAPACITANCE;

EID: 48349125824     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388393     Document Type: Conference Paper

References (5)

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2. N. Yazdi, H. Kulah, and K. Najafi, "Precision Readout Circuits for Capacitive Microaccelerometers," in Proc. IEEE Sensors, Oct., 2004, pp. 28-31.
3. B.V. Amini, S. Pourkamali, and F. Ayazi, "A High Resolution, Stictionless, CMOS Compatible SOI Accelerometer with a Low Noise, Low Power, 0.25-μm CMOS interface," in Proc. IEEE International Conference on MEMS, 2004, pp. 572-575.
4. B.V. Amini and F. Ayazi, "Micro-gravity Capacitive Silicon-on-Insulator Accelerometers," J. Micromech. Microeng., 2005, Vol. 15, pp. 2113-2120.
5. P. Chen, C. Chen, C. Tsai, and W. Lu, "A Time-to-Digital-Converter- Based CMOS Smart Temparature Sensor," IEEE J. Solid-State Circuits, Vol. 40, No. 8, pp. 1642-1648, Aug. 2005.